HUITA OPTO-electronic Materials

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Products > Sputtering Targets > Metal Targets > Tantalum Sputtering Target
Tantalum Sputtering Target
Product name : Tantalum Sputtering Target
Product No. : 2021913152533
Material : Ta
Size : Φ(25mm-800mm) x (3mm~28mm); (1mm~25mm)x≤(10mm-800mm)x≤2000mm
Density(g/cm3) : 16.6
Refractive Index : 
Form : Grey round, square
Purity : 3N, 4N, 5N
Application : Semiconductor and optical coating
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  Details:
Tantalum target: tantalum plane target, tantalum multi arc target
 
Grade: RO5200, RO5400, RO5252 (Ta-2.5W), RO5255 (Ta-10W)
 
Tolerance: Dia tolerance + / - 0.254;
 
Recrystallization: ≥95%;
 
Grain size: ≥40μm;
 
Surface roughness: ≤Ra 0.8;
 
Flatness: ≤0.1mm or 0.10%
 

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